Gas Flow Controller Brooks

The brooks model 5850e mass flow controller is used widely in the semiconductor industry as well as many others where manual electronic or computer controlled gas handling occurs.

Gas flow controller brooks.

Brooks sla5853s2dab2c2a1 mass flow controller gas nitrogen slpm 600 4 20ma new note. Specifications flow ranges water up to 480 gph 1820 l h air up to 2130 scfh 56000 ln h refer to table 1. Per handwriting on the item label this item has been locally configured for nitrogen n2. Find the gas for which the meter is calibrated in the left column move to the right to the gas that is being used.

To determine corrected flowrate. Series fc 8900 controllers are used for accurately adjusting and maintaining liquid and gas flows with variable downstream pressures. The item you ve selected wasn t added to your cart. Brooks instrument is more than a flow meter manufacturer.

The incoming fluid pressure on one side of the diaphragm and outlet pressure plus spring action on the other side position an internal diaphragm actuated control valve. Highlights of the gf series industry leading features include. The model 5850e consists of three basic units. Adding to your cart.

This instruction manual is intended to provide the user with all the information necessary to install operate and maintain these devices. We can not confirm the configuration or ratings. This will equal an approximation of the flowrate of the gas being used. Brooks mass flow controller gas air 5850s 1 2 slpm shipsameday.

Brooks flow controllers are designed to maintain a constant differential pressure across an integral manual flow regulating valve. Brooks instrument mass flow measurement instruments are designed for accurately measuring mfms and rapidly controlling mfcs flows of gases. As the leading supplier of flow technology we offer the world s most comprehensive line of precision flow control and flow measurement devices. Designed for semiconductor mocvd and other gas flow control applications that require a high purity all metal flow path the brooks gf100 series mass flow controllers and meters deliver outstanding performance reliability and flexibility.

This combination produces a stable gas flow which. Explore high performance instruments from mass flow controllers to rotameters supported by expertise and service only found at brooks instrument. From thermal flow sensors and mass flow metering systems we continually launch new products and enhance existing systems to unlock new levels of thermal mass flow measurement precision responsiveness accuracy and repeatability. A flow sensor a control valve and an integral electronic control system.

Details about brooks mass flow controller gas air 5850s 1 2 slpm shipsameday. Multiply the flowrate indicated on the meter by the correction factor. As the global leader in precision fluid measurement and control mass flow meter manufacturer brooks instrument continues to innovate thermal mass flow technology. Pressure and temperature ratings up to 1000 psig 69 bar refer to table 2.